IVBH

The IVBH series vacuum valves have built-in spiral heaters that follow the movement of the bellows. The valve's external and the bellows internal heating units take place with the valve in either the open or closed state. These valves eliminate cold spots by heating externally and internally for a more uniform temperature. This feature will reduce byproduct buildup. The internal and external heaters have individual channels and can heat independently to an arbitrary temperatures up to 180C. In addition, a magnetic proximity open/close switch, and thermostat are available as options.

View Digital Catalog

FEATURES

Because of the internal heater, byproduct adhesion to the O-ring seal surface is reduced, and long-term seal performance can be maintained.
Buildup on the bellows surface is reduced, so there will be less residue fallout when the bellows moves, resulting in minimal particle generation.
Reduced buildup getting caught in the bellows surface, resulting in higher durability bellows.(1 million cycles, actual results)
The connecting flanges are chosen from variety of industry standard fittings, including ISO/KF, JIS VF/VG, ConFlat flange, and ISO MF connections.
Electrical wires for the heater, thermocouples, thermostat (optional), and proximity sensor (optional) may be furnished with user specified connectors.
In addition, special specifications, such as unique brackets, non-standard face-to-face dimension, special flanges, special materials (body, bellows, seal materials), and air fittings can be accommodated.

WETTED AREA MATERIAL

Body/SUS304
Bellows/SUS316L
Actuator/A6063 (magnet for magnetic proximity switch built-in)
Seat/fluorine rubber

PRECAUTIONS

The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Product Selection

JUMP TO: Specifications Product Grade Product Code Key Product Selection

Product Details

Specifications
Maximum Heating Temperature		150ºC~180ºC * Please keep the temperature at the mounting part to be below 70°C, when using DA type with a proximity switch. * Please choose an actuator fitting and gasket material to match the heating temperature. * The maximum heating temperature will vary depending on the type of valve. For details, please ask to the sales representatives.
Temperature Control Method		Temperature controller with K-type thermocouple
Pressure Range		1.4x10^-10~29 psia (1x10^-6 ~2x10⁵ Pa (abs) [0.1MPa (G)])
Standard Materials		Body/SUS304
		Bellows/SUS316L
		Actuator/A6063 (magnet for magnetic proximity switch built-in)
		Seat/fluorine rubber *Other materials not listed may be available.
Bellows/internal Heater Durability		Actual results from more than 1,000,000 cycles (internal vacuum state) in an electrified state (the bellows durability performance drops when it is used on the pressurized side).
Actuation Pressure		58~101 psig ( 0.4~0.7MPa (G))
Allowable Leakage	Across the Seat He Leak Rates	≤ 1x10^-9 sccs (≤ 1x10^-10 Pa·m³/sec)
Allowable Leakage	Inboard He Leak Rates	≤ 1x10^-9 sccs (≤ 1x10^-10 Pa·m³/sec) Permiation through gasket is outside of spec.
IVBH Series
Size	25A	40A	50A	80A	100A
Orifice (inch(mm))	0.91 (23.0)	1.57 (40.0)	1.89 (48.0)	2.76 (70.0)	3.78 (96.0)
Valve Lift (inch(mm))	0.47 (12.0)	0.79 (20.0)	0.98 (25.0)	1.18 (30.0)	1.57 (40.0)
Conductance (ℓ/sec)	11.0	38.0	65.0	135.0	320.0
Heater Voltage (AC V)	100.0	100.0	100.0	100.0	100.0 / 200.0
Internal Heater Power (W)	80.0	106.0	106.0	120.0	172.0 / 212.0
External Heater Power (W)	80.0	120.0	120.0	250.0	354.0 / 300.0
Cylinder Volume (cc) (NC/NO)	13	56	70	136	295
Cylinder Volume (cc) (DA)	-	21	26	50	112
Heater Cord Length (ft(m))	16.4 (5)	16.4 (5)	16.4 (5)	9.8 (3)	9.8 (3)

PRODUCT CODE KEY

Model

Size

Operation

Valve Shape

Connection (Seat Side)

Connection (OUT Side)

Seat Material

Custom Specifications

Accessories

RoHS

IVBH

Specific Code

(RS)

IVBH - Bellows Seal Hot Valve

25: 25A
40: 40A
50: 50A
80S: 80A
100S: 100A

C: Normally Closed
D: Double Acting
O: Normally Open

A: Angle Type
Y: Y-shape Straight
Z: Z-shape Inline

NW: ISO KF Flange
VF: JIS VF Flange
VG: JIS VG Fange
CF: ConFlat Flange
MF: ISO MF Flange

Not Shown: Same Cases As (Seat Side) Omitted
F: JIS VF Flange
G: JIS VG Flange

F: Fluorine Rubber

Not Shown: Standard Products Are Omitted

Not Shown: No Switch
SO: With Switch On the Open Position
SC: With Switch On the Closed Position
W: With Open and Closed Position

Not Shown: With PD31L3 Switch
PE: With PE33L3 Switch

Not Shown: Not RoHS Compliant
(RS): RoHS Compliant Product

* We handle materials and shapes other than those noted.
* A thermostat can be attached to an external heater to prevent eddy heating.
* Confirm the specifications for the heater, thermocouple and thermostat cable connectors with the sales representative.