High-Speed, High-Durability Valves 200C

High-Speed, High-Durability Valves 200C

The TDF series is KITZ SCT's high speed/high durability valve perfect for ALD and similar type processes requiring pulsing. The actuation time of the TDF valve's sealing diaphragm is 5 milliseconds, and full cycle speed is 18 milliseconds. The valve's cycle life rating is 100 million cycles.

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FEATURES

High-speed opening/closing, and high response stability
Compatible with high-temperature fluids
Stable Cv value
High cycle life

WETTED AREA MATERIAL

SUS316L, SUS316LE (Double melt material)
PFA
Cobalt alloy

PRECAUTIONS

The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance

Product Selection

JUMP TO: Specifications Product Grade Product Code Key Product Selection

Product Details

Specifications
Size		1/2″
*Cv at 220℃　1**		0.5
Maximum Operating Pressure		101.5psig (0.7 MPa(G))
Wetted Area Volume		0.1172in³ (1.92 cm³ (C-seal, 2-port))
		0.1532in³ (2.51 cm³ (C-seal, 3-port))
Fluid Temperature		80℃～220℃ *2
Atmospheric Temperature		20℃～130℃ 20℃～70℃ (with sensor and solenoid valve installed)
*Response Speed 3**		18±2 ms
Leak Rates (Room temperature when shipped)	Across the Seat He Leak Rates	≤ 1×10^-9 sccs (≤ 1×10^-10Pa·m³/sec)
	Inboard He Leak Rates	≤ 1×10^-9 sccs (≤ 1×10^-10Pa·m³/sec)
Actuation pressure		65.3-87.0psig (0.45 ‒ 0.6 MPa(G))
1 The minimum value is stated by Cv value measurement (220˚C) based on SEMASPEC90120394B-STD. 2 Room temperature - 220°C if not used continuously, and up to 200°C with sensor and solenoid valve installed. *3 Motion of the valve from a closed state to opening; Time between the instant when the solenoid valve signal is turned ON and the instant when the valve is fully opened under the following conditions: (Operating pressure: 0.48MPa, tube: length between the solenoid valve and the valve 76.2mm, inside diameter 2mm)
Product Grade
Grade	STD	EP	SEP
Body Material	SUS316L		SUS316LE (Double melt material)
Surface Roughness	≦ Rz 3.2 μm	≦ Rz 0.7 μm
Polish	Mechanical polished	Electro polished
Cleaning	Degreasing + Precision cleaning
Packaging	Single bagged package	Double bagged package

PRODUCT CODE KEY

Model

Size

Operation

Valve Shape

Connection

Fitting Size

Seat Material

Open/Close Sensor

Option

Grade

TDF

EP-316L

TDF - type
Diaphragm Valve
(High-speed high-durability spec)

8: 1.5" HF

C: Pneumatic Valve
Normally Closed

S: Straight
B: Branch

G: C-seal
Surface Mount
V: CVC Male
VF: CVC Female

Not shown: 1/2"
4: 1/4"
(CVC only)

A: PFA

Not Shown: Without sensor
S: With open/close sensor

Serial no: Sensor spec with solenoid valve
Other special spec

STD-316L: Mechanical Polished + SUS316L
EP-316L: Electro Polished + SUS316L
SEP-316LE: Electro Polished + Double melt material

* For normally open type, contact our sales representative.